Optics and Precision Engineering, Volume. 20, Issue 8, 1772(2012)
Driving characteristics of non-overlap vertical electrostatic combdriver for optical translational micromirror
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ZHAI Lei-ying, XU Jing, ZHONG Shao-long, WU Ya-ming. Driving characteristics of non-overlap vertical electrostatic combdriver for optical translational micromirror[J]. Optics and Precision Engineering, 2012, 20(8): 1772
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Received: Apr. 11, 2012
Accepted: --
Published Online: Sep. 4, 2012
The Author Email: Lei-ying ZHAI (lyzhai@mail.sim.ac.cn)
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