[1] MIAO Erlong, ZHANG Jian, GU Yongqiang et al. Measurement error analysis of high precision Fizeau interferometer for lithography projection objective[J]. Chinese Journal of Lasers, 37, 2029-2034(2010).

[2] WEI Haoming, XING Yanwen, LI Yun et al. Measurement errors in 632.8 nm high precision phase-shifting Fizeau interferometer[J]. Laser & Optoelectronics Progress, 47, 60-67.(2010).

[3] MALACARA D[M]. Phase shifting interferometry, in optical shop testing., 589-621(2007).

[4] MIAO Erlong, GU Yongqiang. Temperature influence on Fizeau interferometer repeatability[J]. Acta Optica Sinica, 31, 147-151(2011).

[5] WANG Ping, WANG Rudong, TIAN Wei et al. Design and analysis of thermal stability for main frame in Fizeau interferometer[J]. Optics and Precision Engineering, 19, 2100-2107(2011).

[6] WANG Ming, HAO Qun, ZHU Qiudong et al. Anti disturbance phase shifting interferometry method time and frequency domain[J]. Acta Optica Sinica, 31, 146-150(2011).

[7] ZHU Rihong, CHEN Lei, WANG Qing et al. Phase shift interferometry and its application[J]. Journal of Applied Optics, 27, 85-88(2006).

[8] WEI H M, XING Y W. Vibration errors in phase-shifting interferometer[J]. SPIE, 7511, 75110H-1-9.(2009).

[9] WANG H J, CAO J F, TIAN A L et al. Vibration influence and error compensation of aspherical surface interferometer[J]. SPIE, 7155, 71552V-1-8.(2008).

[10] DE GROOT P J. Vibration in phase-shifting interferometry[J]. Opt. Soc. Am., A 12, 354-365.(1995).

[11] DECK L L. Suppressing phase errors from vibration in phase-shifting interferometry[J]. Appl. Opt., 48, 3948-3960(2009).

[12] DOLOCA R, TUTSCH R. Vibration induced phase-shift interferometer[J]. SPIE, 6292, 62920Y-1-8.(2006).

[13] DECK L, DE GROOT P J. The state of the art in swept-wavelength laser Fizeau interferometry[J]. SPIE, 11817, 1-14.(2021).

[14] WANG R D, TIAN W, WANG P et al. Analysis of vibration effect to surface figure measurement[J]. Acta Optica Sinica., 32, 1112001(2012).

[15] HE Zubin. Research on anti-vibration technology of phase-shifting interferometer[D](2007).