Researching | Spectrum analysis of low frequency vibration in interferometry

Journal of Applied Optics, Volume. 45, Issue 5, 1019(2024)

Spectrum analysis of low frequency vibration in interferometry

Wujun LYU1... Sen HAN1,2,*, Jidong XU2, Yuhang SHEN1, Linghua ZHANG1,2, Ying YANG1 and Jingming GUO1 |Show fewer author(s)

Author Affiliations

¹School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

²Suzhou H & L Instruments LLC., Suzhou 215123, China

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Figures & Tables(9)

Fig. 1. RMS phase error of PSI algorithm

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Fig. 2. Phase distribution to be measured

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Fig. 3. Phase error diagram

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Fig. 4. 2D data phase error diagram

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Fig. 5. Experimental surface interferogram and surface phase

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Fig. 6. Phase error diagram

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Fig. 7. 2D data phase error diagram

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Table 1. Simulation results
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Table 1. Simulation results
波面 RMS值/rad 相位误差/rad
PSI算法求解波面 0.2468 0.3356
$γ$ 因子处理波面 0.0099 0.0155

Table 2. Experimental results
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Table 2. Experimental results
波面 RMS值/rad 相位误差/rad
PSI算法求解波面 0.2340 0.3357
$γ$ 因子处理波面 0.0102 0.0158

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Wujun LYU, Sen HAN, Jidong XU, Yuhang SHEN, Linghua ZHANG, Ying YANG, Jingming GUO. Spectrum analysis of low frequency vibration in interferometry[J]. Journal of Applied Optics, 2024, 45(5): 1019

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Paper Information

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Received: Nov. 27, 2023

Accepted: Aug. 14, 2024

Published Online: Dec. 20, 2024

The Author Email: HAN Sen (韩森)

DOI:10.5768/JAO202445.0503004

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology