Chinese Journal of Quantum Electronics, Volume. 23, Issue 2, 222(2006)
Carbon doped GaAs epitaxial layer grown by MOCVD
The GaAs epitaxial layers of various dopant concentration are grown with CCl4as the doping source by the EMCORE D125 MOCVD system. The C-doped GaAs optical properties are studied by PL,DC XRD. With C dopant concentration increase,band gap shrink,FWHM of PL increase,and lattice constant decrease.
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XING Yan-hui, LI Jian jun, DENG Jun, HAN Jun, GAI Hong-xing, SHENG Guang-di. Carbon doped GaAs epitaxial layer grown by MOCVD[J]. Chinese Journal of Quantum Electronics, 2006, 23(2): 222
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Received: Nov. 1, 2004
Accepted: --
Published Online: Jun. 7, 2010
The Author Email: Yan-hui XING (xingyanhui@bjut.edu.cn)
CSTR:32186.14.