Chinese Journal of Quantum Electronics, Volume. 23, Issue 2, 222(2006)

Carbon doped GaAs epitaxial layer grown by MOCVD

Yan-hui XING*... jun LI Jian, Jun DENG, Jun HAN, Hong-xing GAI and Guang-di SHENG |Show fewer author(s)
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    The GaAs epitaxial layers of various dopant concentration are grown with CCl4as the doping source by the EMCORE D125 MOCVD system. The C-doped GaAs optical properties are studied by PL,DC XRD. With C dopant concentration increase,band gap shrink,FWHM of PL increase,and lattice constant decrease.

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    XING Yan-hui, LI Jian jun, DENG Jun, HAN Jun, GAI Hong-xing, SHENG Guang-di. Carbon doped GaAs epitaxial layer grown by MOCVD[J]. Chinese Journal of Quantum Electronics, 2006, 23(2): 222

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    Paper Information

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    Received: Nov. 1, 2004

    Accepted: --

    Published Online: Jun. 7, 2010

    The Author Email: Yan-hui XING (xingyanhui@bjut.edu.cn)

    DOI:

    CSTR:32186.14.

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