Infrared and Laser Engineering, Volume. 46, Issue 7, 717003(2017)

Measurement of large step structure with a speed-variable scanning technology

Lei Lihua*, Li Yuan, Cai Xiaoyu, Wei Jiasi, Fu Yunxia, and Shao Li
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    Lei Lihua, Li Yuan, Cai Xiaoyu, Wei Jiasi, Fu Yunxia, Shao Li. Measurement of large step structure with a speed-variable scanning technology[J]. Infrared and Laser Engineering, 2017, 46(7): 717003

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    Paper Information

    Category: 光电测量

    Received: Nov. 15, 2016

    Accepted: Dec. 19, 2016

    Published Online: Sep. 21, 2017

    The Author Email: Lihua Lei (leilh@simt.com.cn)

    DOI:10.3788/irla201746.0717003

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