Infrared and Laser Engineering, Volume. 46, Issue 7, 717003(2017)
Measurement of large step structure with a speed-variable scanning technology
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Lei Lihua, Li Yuan, Cai Xiaoyu, Wei Jiasi, Fu Yunxia, Shao Li. Measurement of large step structure with a speed-variable scanning technology[J]. Infrared and Laser Engineering, 2017, 46(7): 717003
Paper Information
Category: 光电测量
Received: Nov. 15, 2016
Accepted: Dec. 19, 2016
Published Online: Sep. 21, 2017
The Author Email: Lihua Lei (leilh@simt.com.cn)
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