Infrared and Laser Engineering, Volume. 46, Issue 7, 717003(2017)
Measurement of large step structure with a speed-variable scanning technology
A white light interference system was developed with a speed-variable scanning technology to improve signal utilization precision and short measuring time for a large step structure measurement. A Fourier transform and unilateral step evaluation algorithm were performed for processing the scanning interference images. A calibrated standard step height of 9.976±0.028 μm was measured by the white light interference system using the speed-variable scanning method, the measuring time was 35 s, which was much shorter than a conventional measuring time of 222 s. A 10-times-repetitive-measurement shows a result of 9.971 μm with a standard deviation of 0.007 μm, illustrates that the system has accuracy and high-efficiency in the measurement of large step structure.
Get Citation
Copy Citation Text
Lei Lihua, Li Yuan, Cai Xiaoyu, Wei Jiasi, Fu Yunxia, Shao Li. Measurement of large step structure with a speed-variable scanning technology[J]. Infrared and Laser Engineering, 2017, 46(7): 717003
Category: 光电测量
Received: Nov. 15, 2016
Accepted: Dec. 19, 2016
Published Online: Sep. 21, 2017
The Author Email: Lihua Lei (leilh@simt.com.cn)