Semiconductor Optoelectronics, Volume. 43, Issue 3, 561(2022)

Effect of Deposition Conditions on Microstructure and Photoelectric Properties of AZO Films by Magnetron Sputtering at Room Temperature

MO Minjing1... LIU Zhe1, MA Ziteng1, DONG Zhihu1, LIU Yong1, WEI Changwei2 and HE Chunqing1,* |Show fewer author(s)
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    MO Minjing, LIU Zhe, MA Ziteng, DONG Zhihu, LIU Yong, WEI Changwei, HE Chunqing. Effect of Deposition Conditions on Microstructure and Photoelectric Properties of AZO Films by Magnetron Sputtering at Room Temperature[J]. Semiconductor Optoelectronics, 2022, 43(3): 561

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    Paper Information

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    Received: Dec. 22, 2021

    Accepted: --

    Published Online: Aug. 1, 2022

    The Author Email: Chunqing HE (hecq@whu.edu.cn)

    DOI:10.16818/j.issn1001-5868.2021122202

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