Semiconductor Optoelectronics, Volume. 43, Issue 3, 561(2022)
Effect of Deposition Conditions on Microstructure and Photoelectric Properties of AZO Films by Magnetron Sputtering at Room Temperature
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MO Minjing, LIU Zhe, MA Ziteng, DONG Zhihu, LIU Yong, WEI Changwei, HE Chunqing. Effect of Deposition Conditions on Microstructure and Photoelectric Properties of AZO Films by Magnetron Sputtering at Room Temperature[J]. Semiconductor Optoelectronics, 2022, 43(3): 561
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Received: Dec. 22, 2021
Accepted: --
Published Online: Aug. 1, 2022
The Author Email: Chunqing HE (hecq@whu.edu.cn)