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Semiconductor Optoelectronics, Volume. 43, Issue 3, 561(2022)

Effect of Deposition Conditions on Microstructure and Photoelectric Properties of AZO Films by Magnetron Sputtering at Room Temperature

MO Minjing1... LIU Zhe1, MA Ziteng1, DONG Zhihu1, LIU Yong1, WEI Changwei2 and HE Chunqing1,* |Show fewer author(s)
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    MO Minjing, LIU Zhe, MA Ziteng, DONG Zhihu, LIU Yong, WEI Changwei, HE Chunqing. Effect of Deposition Conditions on Microstructure and Photoelectric Properties of AZO Films by Magnetron Sputtering at Room Temperature[J]. Semiconductor Optoelectronics, 2022, 43(3): 561

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    Received: Dec. 22, 2021

    Accepted: --

    Published Online: Aug. 1, 2022

    The Author Email: Chunqing HE (hecq@whu.edu.cn)

    DOI:10.16818/j.issn1001-5868.2021122202

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology