Optics and Precision Engineering, Volume. 17, Issue 2, 333(2009)

Integrating positioning X-Y stage based on bulk micromachining

WANG Jia-chou1,*... RONG Wei-bin2, LI Xin-xin1, SUN Li-ning2 and MA Li3 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(11)

    [1] [1] TANG W C, NGUYEN T H, HOWE R T. Laterally driven polysilicon resonant microstructures[J].Sensors Actuators, 1989,20:25-32.

    [2] [2] CHENG B L, LI X X, WANG Y L, et al.. High performance accelerometers with advanced bulk micromachining technology [J]. Chinese Journal of Semiconductors, 2005,26(3):547-553. (in Chinese)

    [3] [3] KAZUHIRO T, MAKOTO M, HIROYUKI F, et al.. A high fill-factor comb-driven XY-stage with topological layer switches architecture [J]. IEICE Electronics Express, 2006,3(9):197-202.

    [4] [4] GU L, LI X X, BAO H F, et al..Single-wafer-processed nano-positioning XY-stages with trench-sidewall micromachining technonogy [J].J.Micromech. Microeng, 2006,16:1349-1357.

    [5] [5] KIM CH HE, JEONG H M, JEON J U, et al.. Silicon micro xy-stage with a large area shuttle and no-etching holes for SPM-Based data storage[J]. Journal of Microelectromechanical System, 2003,12(4):470-478.

    [6] [6] LEE C S B, HAN S, MACDONALD N C. Single crystal silicon(SCS) XY-stage fabricated by DRIE and IR alignment[C]. Proceedings of the 2000 IEEE Conference on MEMS, No.00CH3608.

    [7] [7] CHEN H K, YONG K K. Micro XY-stage using silicon on a glass substrate [J]. J.Micromech. Microeng, 2002,12(2):103-107.

    [9] [9] ZHOU G Y, DOWD P. Tilted folded-beam suspension for extending the stable travel rang of comb-drive actuators [J]. J.Micromech. Microeng, 2003, 13:178-183.

    [10] [10] BAO M H. Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes [M]. NewYork: Elsevier, 2000.

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    WANG Jia-chou, RONG Wei-bin, LI Xin-xin, SUN Li-ning, MA Li. Integrating positioning X-Y stage based on bulk micromachining[J]. Optics and Precision Engineering, 2009, 17(2): 333

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    Paper Information

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    Received: Apr. 21, 2008

    Accepted: --

    Published Online: Oct. 9, 2009

    The Author Email: Jia-chou WANG (jiatao_wang@163.com)

    DOI:

    CSTR:32186.14.

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