Optics and Precision Engineering, Volume. 17, Issue 2, 333(2009)
Integrating positioning X-Y stage based on bulk micromachining
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WANG Jia-chou, RONG Wei-bin, LI Xin-xin, SUN Li-ning, MA Li. Integrating positioning X-Y stage based on bulk micromachining[J]. Optics and Precision Engineering, 2009, 17(2): 333
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Received: Apr. 21, 2008
Accepted: --
Published Online: Oct. 9, 2009
The Author Email: Jia-chou WANG (jiatao_wang@163.com)
CSTR:32186.14.