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Optics and Precision Engineering, Volume. 17, Issue 2, 333(2009)

Integrating positioning X-Y stage based on bulk micromachining

WANG Jia-chou1,*... RONG Wei-bin2, LI Xin-xin1, SUN Li-ning2 and MA Li3 |Show fewer author(s)
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  • 3[in Chinese]
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    WANG Jia-chou, RONG Wei-bin, LI Xin-xin, SUN Li-ning, MA Li. Integrating positioning X-Y stage based on bulk micromachining[J]. Optics and Precision Engineering, 2009, 17(2): 333

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    Paper Information

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    Received: Apr. 21, 2008

    Accepted: --

    Published Online: Oct. 9, 2009

    The Author Email: Jia-chou WANG (jiatao_wang@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology