In order to realize the miniaturized nano-positioning stage, a novel 2-DOF Single Crystal Silicon (SCS) nano-positioning micro X-Y stage with the function of displacement detection is successfully developed by using silicon bulk-micromachining; the X-Y stage is drived by an electrostatics comb actuator. The theories of electromechanical coupling and energy conservation are used to analyze electrostatic actuated mechanism, X-Y stage static characteristic and X-Y stage dynamic characteristic. Some failure modes of X-Y stage are also presented and the electromechanical side instability and the stable travel range of comb-drive actuators are investigated. The stable travel range depends on the finger gap spacing, the initial finger overlap and the spring stiffness ratio of the compliant suspension. Additionally, by taking into account the effect of the air damping on the X-Y stage dynamic characteristic, the maximum velocity, stable travel range and critical driving voltage are given to an experiment on closed-loop control. The experimental results indicate that the analyzed characteristics are useful in the design and control of the micro X-Y stage. Under 30 V driving voltage, the single-axis displacement output is 10 μm, and the closed-loop step response is only 2.5 ms.