Fig. 1. (a) Structure of EBCMOS electron multiplier layer; (b) The trajectory diagram of electron movement in the blue dotted line box in (a)

Fig. 2. (a) Multiplier electron drop point diagram; (b) Statistical chart of landing point

Fig. 3. PSF images at different base thicknesses (The inner panel shows the top view of PSF)

Fig. 4. LSF curve (a) and MTF curve (b) under different base thickness

Fig. 5. PSF images at different substrate doping concentrations (The inner panel shows the top view of PSF)

Fig. 6. LSF curve (a) and MTF curve (b) under different substrate doping concentration

Fig. 7. PSF images at different incident electron energies (The inner panel shows the top view of PSF)

Fig. 8. LSF curve (a) and MTF curve (b) under different incident electron energies