Laser & Optoelectronics Progress, Volume. 55, Issue 3, 030008(2018)
Research Progress of Measurement Technology for Large-Diameter Aspheric Elements on Grinding Stage
Fig. 1. Flow chart of optics aspheric elements processing chain
Fig. 2. Commercial instruments for large aperture aspheric measurement. (a) ZEISS XENOS; (b) Leitz Infinity; (c) PGI Dimension
Fig. 3. Swing-arm profilometer
Fig. 4. Flow chart of the compensation grinding for aspheric surface
Fig. 5. Device of large-diameter aspheric grinding on-machine measurement[28]
Fig. 6. Measurement results of (a) visible light interferometer and (b) CO2 infrared interferometer
Fig. 7. Profile scanning measuring devices of Cranfield University
Fig. 8. 3D profile error of aspheric surface
Fig. 9. Non-contact scanning measuring instruments. (a) Nanomefos; (b) Luphoscan
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Jianpu Xi, Bin Li, Dongxu Ren, Zexiang Zhao. Research Progress of Measurement Technology for Large-Diameter Aspheric Elements on Grinding Stage[J]. Laser & Optoelectronics Progress, 2018, 55(3): 030008
Category: General
Received: Sep. 11, 2017
Accepted: --
Published Online: Sep. 10, 2018
The Author Email: Xi Jianpu (xjpyq2010@163.com)