Optics and Precision Engineering, Volume. 22, Issue 10, 2645(2014)

Effects of annealing on properties of Ta2O5 thin films deposited by ion beam sputtering

LIU Hua-song1...2,*, JIANG Cheng-hui1, WANG Li-shuan1,2, LIU Dan-dan1, JI Yi-qin1,2 and CHEN De-ying2 |Show fewer author(s)
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    References(18)

    [1] [1] HERRMANN W C. E-beam deposition characteristics of reactively evaporated Ta2O5 for optical interference coatings [J]. Journal of Vacuum Science and Technology, 1981,18(3):1303-1305.

    [2] [2] SCHILLER S, HEISIG U, STEINFELDER K, et al.. Reactive DC sputtering with the magnetron-plasmatron for tantalum pentoxide and titanium dioxide films [J]. Thin Solid Films, 1979, 63(2): 369-375.

    [4] [4] MARTIN P J, MACLEOD H A, NETTERFIELD R P, et al.. Ion-beam-assisted deposition of thin films [J]. Applied Optics, 1983, 22(1):178-184.

    [6] [6] AL-JUMAILY G A, EDLOU S M. Optical properties of tantalum pentoxide coatings deposited using ion beam processes [J]. Thin Solid Films, 1992, 209(2):223-229.

    [7] [7] DEMIRYONT H, SITES J R, GEIB K. Effects of oxygen content on the optical properties of tantalum oxide films deposited by ion-beam sputtering [J]. Applied Optics, 1985, 24(4):490-495.

    [8] [8] LIU H, XIONG S, LI L, et al.. Variation of the deposition rate during ion beam sputter deposition of optical thin films [J]. Thin Solid Films, 2005, 484(1):170-173.

    [9] [9] YOON S G, KIM Y T, KIM H K, et al.. Comparison of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering [J]. Materials Science and Engineering: B, 2005, 118(1):234-237.

    [10] [10] YOON S G, KIM H K, KIM M J, et al.. Effect of substrate temperature on surface roughness and optical properties of Ta2O5 using ion-beam sputtering [J]. Thin Solid Films, 2005, 475(1):239-242.

    [11] [11] HUANG A P, CHU P K. Characteristics of interface between Ta2O5 thin film and Si (100) substrate [J]. Surface and Coatings Technology, 2005, 200(5):1714-1718.

    [12] [12] CHENG W H, CHI S F, CHU A K. Effect of thermal stresses on temperature dependence of refractive index for Ta2O5 dielectric films [J]. Thin Solid Films, 1999, 347(1): 233-237.

    [13] [13] LIU W J, CHIEN C H. Influences of residual argon gas and thermal annealing on Ta2O5 thin films [J]. Japanese Journal of Applied Physics, 2005, 44(1R):181.

    [14] [14] HUANG A P, CHU P K. Crystallization improvement of Ta2O5 thin films by the addition of water vapor [J]. Journal of Crystal Growth, 2005, 274(1):73-77.

    [15] [15] MASSE J P, SZYMANOWSKI H, ZABEIDA O, et al.. Stability and effect of annealing on the optical properties of plasma-deposited Ta2O5 and Nb2O5 films [J]. Thin Solid Films, 2006, 515(4):1674-1682.

    [16] [16] UTHANNA S, CHANDRA S V, REDDY P S, et al.. Effect of postdeposition annealing on the structural, electrical, and optical properties of DC magnetron sputtered Ta2O5 films[J].J. Phys. Conf. Ser.,2008,114(1):012035.

    [18] [18] STONEY G G.The tension of metallic films deposited by electrolysis[J].Pro. R Soc. A,1909,82:172-175.

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    LIU Hua-song, JIANG Cheng-hui, WANG Li-shuan, LIU Dan-dan, JI Yi-qin, CHEN De-ying. Effects of annealing on properties of Ta2O5 thin films deposited by ion beam sputtering[J]. Optics and Precision Engineering, 2014, 22(10): 2645

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    Paper Information

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    Received: Nov. 18, 2013

    Accepted: --

    Published Online: Nov. 6, 2014

    The Author Email: Hua-song LIU (liuhuasong@hotmail.com)

    DOI:10.3788/ope.20142210.2645

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