Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Optics and Precision Engineering, Volume. 22, Issue 10, 2645(2014)

Effects of annealing on properties of Ta2O5 thin films deposited by ion beam sputtering

LIU Hua-song1...2,*, JIANG Cheng-hui1, WANG Li-shuan1,2, LIU Dan-dan1, JI Yi-qin1,2 and CHEN De-ying2 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (18)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    LIU Hua-song, JIANG Cheng-hui, WANG Li-shuan, LIU Dan-dan, JI Yi-qin, CHEN De-ying. Effects of annealing on properties of Ta2O5 thin films deposited by ion beam sputtering[J]. Optics and Precision Engineering, 2014, 22(10): 2645

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 18, 2013

    Accepted: --

    Published Online: Nov. 6, 2014

    The Author Email: Hua-song LIU (liuhuasong@hotmail.com)

    DOI:10.3788/ope.20142210.2645

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology