High Power Laser and Particle Beams, Volume. 37, Issue 2, 021004(2025)
Protective layer of oxides and nitrides on the surface of extreme ultraviolet multilayers
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Jiaxing Wang, Weiming Han, Han Zhang, Shangqi Kuang. Protective layer of oxides and nitrides on the surface of extreme ultraviolet multilayers[J]. High Power Laser and Particle Beams, 2025, 37(2): 021004
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Received: Jun. 28, 2024
Accepted: Nov. 18, 2024
Published Online: Mar. 25, 2025
The Author Email: Kuang Shangqi (ksq@cust.edu.cn)