Fig. 1. GIXR test and fitting results of the Mo/Si multilayer film

Fig. 2. Relation between Ti target voltage and N₂ flow rate

Fig. 3. Relation between Zr target voltage and N₂ flow rate

Fig. 4. Relation between Ti target voltage and O₂ flow rate

Fig. 5. GIXR test and fitting results of multilayer film with TiN capping layer

Fig. 6. XPS analysis results of TiN film

Fig. 7. TEM analysis results of Mo/Si multilayer film with TiN capping layer

Fig. 8. GIXR test and fitting results of multilayer film with ZrN capping layer

Fig. 9. XPS analysis results of ZrN film

Fig. 10. TEM analysis results of Mo/Si multilayer film with ZrN capping layer

Fig. 11. GIXR test and fitting results of multilayer film with TiO₂ capping layer

Fig. 12. XPS analysis results of TiO₂ films

Fig. 13. TEM analysis results of Mo/Si multilayer film with TiO₂ capping layer