Opto-Electronic Engineering, Volume. 50, Issue 3, 220048(2023)

Femtosecond laser two-photon polymerization three-dimensional micro-nanofabrication technology

Yuanyuan Zhao1... Feng Jin2, Xianzi Dong2, Meiling Zheng2 and Xuanming Duan1,* |Show fewer author(s)
Author Affiliations
  • 1Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou, Guangdong 511443, China
  • 2Laboratory of Organic NanoPhotonics and CAS Key Laboratory of BioInspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
  • show less
    References(9)

    [15] [15] Zhao Y Y. Research on functionalization of microscale structures and their integrated fabrication technology[D]. Beijing: University of Chinese Academy of Sciences, 2016

    [45] [45] Baldacchini T. Three-Dimensional Microfabrication Using Two-Photon Polymerization: Fundamentals, Technology, and Applications[M]. Amsterdam: Elsevier, 2015.

    [47] [47] Bauhofer A. Multiscale effects of photochemical shrinkage in direct laser writing[D]. Zurich: ETH Zurich, 2019.

    [70] [70] Odian G. Principles of Polymerization[M]. 4th ed. Hoboken: John Wiley & Sons, 2004.

    [72] [72] Muller J B. Exploring the mechanisms of Three-Dimensional direct laser writing by multi-photon polymerization[D]. Karlsruhe: Karlsruher Institut für Technologie, 2015.

    [77] [77] Fischer J. Three-dimensional optical lithography beyond the diffraction limit[D]. Verlag Nicht Ermittelbar, 2012.

    [146] [146] Balli F. Optical metasurfaces[D]. Lexington: University of Kentucky, 2021.

    [164] [164] Camayd-Muoz P, Faraon A. Scaling laws for inverse-designed metadevices[C]//CLEO: QELS_Fundamental Science 2018, 2018: FF3C. 7.

    [184] [184] Baldacchini T. Three-Dimensional Microfabrication Using Two-Photon Polymerization[M]. 2nd ed. Oxford: William Andrew, 2019.

    Tools

    Get Citation

    Copy Citation Text

    Yuanyuan Zhao, Feng Jin, Xianzi Dong, Meiling Zheng, Xuanming Duan. Femtosecond laser two-photon polymerization three-dimensional micro-nanofabrication technology[J]. Opto-Electronic Engineering, 2023, 50(3): 220048

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Article

    Received: Apr. 13, 2022

    Accepted: Jul. 7, 2022

    Published Online: May. 4, 2023

    The Author Email:

    DOI:10.12086/oee.2023.220048

    Topics