Opto-Electronic Engineering, Volume. 50, Issue 3, 220048(2023)

Femtosecond laser two-photon polymerization three-dimensional micro-nanofabrication technology

Yuanyuan Zhao1... Feng Jin2, Xianzi Dong2, Meiling Zheng2 and Xuanming Duan1,* |Show fewer author(s)
Author Affiliations
  • 1Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou, Guangdong 511443, China
  • 2Laboratory of Organic NanoPhotonics and CAS Key Laboratory of BioInspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
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    Femtosecond laser two-photon polymerization (TPP) micro-nano fabrication technology, as an important method for the preparation of three-dimensional (3D) micro-nanostructures, has become a hot spot of international frontier research. Using the two-photon absorption effect and the threshold effect of the interaction between laser and matter, this technology can break through the diffraction limit of classical optical theory and achieve nanoscale laser fabrication resolution. It is expected to play an important role in the field of 3D functional micro-nano device fabrication. In this paper, the basic principles of photophysical and photochemical processes in femtosecond pulsed laser TPP fabrication technology will be described, and the research progress and development of this technology in improving line width and fabrication resolution, and improving fabrication efficiency will be reviewed. Then, using the high spatial resolution and true 3D fabrication characteristics of femtosecond laser TPP micro-nano fabrication technology, the researchers prepared various micro-optical devices, integrated optical devices, micro-electromechanical systems, and biomedical devices, fully demonstrating the application prospect of this technology. Finally, how to achieve high-precision, high-efficiency, low-cost, large-area, multi-functional materials and microstructure fabrication, as well as existing challenges and future development directions are discussed and prospected.

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    Yuanyuan Zhao, Feng Jin, Xianzi Dong, Meiling Zheng, Xuanming Duan. Femtosecond laser two-photon polymerization three-dimensional micro-nanofabrication technology[J]. Opto-Electronic Engineering, 2023, 50(3): 220048

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    Paper Information

    Category: Article

    Received: Apr. 13, 2022

    Accepted: Jul. 7, 2022

    Published Online: May. 4, 2023

    The Author Email:

    DOI:10.12086/oee.2023.220048

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