[1] B. Jalali, S. Fathpour. Silicon photonics. J. Lightwave Technol., 24, 4600-4615(2006).

[2] D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, M. Nedeljkovic. Roadmap on silicon photonics. J. Opt., 18, 073003(2016).

[3] R. Marchetti, V. Vitali, C. Lacava, I. Cristiani, B. Charbonnier, V. Muffato, M. Fournier, P. Minzioni. Group-velocity dispersion in SOI-based channel waveguides with reduced-height. Opt. Express, 25, 9761-9767(2017).

[4] R. Marchetti, V. Vitali, C. Lacava, I. Cristiani, G. Giuliani, V. Muffato, M. Fournier, S. Abrate, R. Gaudino, E. Temporiti, L. Carroll, P. Minzioni. Low-loss micro-resonator filters fabricated in silicon by CMOS-compatible lithographic techniques: design and characterization. Appl. Sci., 7, 174(2017).

[5] I. Sackey, A. Gajda, A. Peczek, E. Liebig, L. Zimmermann, K. Petermann, C. Schubert. 1.024  Tb/s wavelength conversion in a silicon waveguide with reverse-biased p-i-n junction. Opt. Express, 25, 21229-21240(2017).

[6] Y. Long, A. Wang, L. Zhou, J. Wang. All-optical wavelength conversion and signal regeneration of PAM-4 signal using a silicon waveguide. Opt. Express, 24, 7158-7167(2016).

[7] B. Troia, A. Z. Khokhar, M. Nedeljkovic, S. A. Reynolds, Y. Hu, G. Z. Mashanovich, V. M. Passaro. Design procedure and fabrication of reproducible silicon Vernier devices for high-performance refractive index sensing. Sensors, 15, 13548-13567(2015).

[8] A. K. Goyal, H. S. Dutta, S. Pal. Recent advances and progress in photonic crystal-based gas sensors. J. Phys. D, 50, 203001(2017).

[9] A. Bag, M. Neugebauer, U. Mick, S. Christiansen, S. A. Schulz, P. Banzer. Towards fully integrated photonic displacement sensors. Nat. Commun., 11, 2915(2020).

[10] N. C. Harris, D. Bunandar, M. Pant, G. R. Steinbrecher, J. Mower, M. Prabhu, T. Baehr-Jones, M. Hochberg, D. Englund. Large-scale quantum photonic circuits in silicon. Nanophotonics, 5, 456-468(2016).

[11] S. Cammarata, A. Fontana, A. E. Kaplan, S. Cornia, T. H. Dao, C. Lacava, V. Demontis, S. Iadanza, V. Vitali, F. De Matteis, E. Pedreschi, G. Magazzù, A. Toncelli, F. Spinella, S. Saponara, R. Gunnella, F. Rossella, A. Salamon, V. Bellani. Polarization control in integrated graphene-silicon quantum photonics waveguides. Materials, 15, 8739(2022).

[12] R. Marchetti, C. Lacava, L. Carroll, K. Gradkowski, P. Minzioni. Coupling strategies for silicon photonics integrated chips. Photonics Res., 7, 201-239(2019).

[13] M. Papes, P. Cheben, D. Benedikovic, J. H. Schmid, J. Pond, R. Halir, A. Ortega-Moñux, G. Wangüemert-Pérez, N. Y. Winnie, D.-X. Xu, S. Janz, M. Dado, V. Vašinek. Fiber-chip edge coupler with large mode size for silicon photonic wire waveguides. Opt. Express, 24, 5026-5038(2016).

[14] P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, M.-J. Picard. Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency. Opt. Express, 23, 22553-22563(2015).

[15] D. Taillaert, P. Bienstman, R. Baets. Compact efficient broadband grating coupler for silicon-on-insulator waveguides. Opt. Lett., 29, 2749-2751(2004).

[16] A. Bozzola, L. Carroll, D. Gerace, I. Cristiani, L. C. Andreani. Optimising apodized grating couplers in a pure SOI platform to -0.5  dB coupling efficiency. Opt. Express, 23, 16289-16304(2015).

[17] G. Roelkens, D. Van Thourhout, R. Baets. High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay. Opt. Express, 14, 11622-11630(2006).

[18] Y. Ding, H. Ou, C. Peucheret. Ultrahigh-efficiency apodized grating coupler using fully etched photonic crystals. Opt. Lett., 38, 2732-2734(2013).

[19] D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens. High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform. Opt. Express, 18, 18278-18283(2010).

[20] Y. Tang, Z. Wang, L. Wosinski, U. Westergren, S. He. Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits. Opt. Lett., 35, 1290-1292(2010).

[21] L. He, Y. Liu, C. Galland, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, M. Hochberg. A high-efficiency nonuniform grating coupler realized with 248-nm optical lithography. IEEE Photonics Technol. Lett., 25, 1358-1361(2013).

[22] M. H. Lee, J. Y. Jo, D. W. Kim, Y. Kim, K. H. Kim. Comparative study of uniform and nonuniform grating couplers for optimized fiber coupling to silicon waveguides. J. Opt. Soc. Korea, 20, 291-299(2016).

[23] F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, R. Baets. Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides. J. Lightwave Technol., 25, 151-156(2007).

[24] N. Hoppe, W. S. Zaoui, L. Rathgeber, Y. Wang, R. H. Klenk, W. Vogel, M. Kaschel, S. L. Portalupi, J. Burghartz, M. Berroth. Ultra-efficient silicon-on-insulator grating couplers with backside metal mirrors. IEEE J. Sel. Top. Quantum Electron., 26, 8200206(2019).

[25] S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. Van Thourhout, R. Baets. Highly efficient grating coupler between optical fiber and silicon photonic circuit. Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference, 1-2(2009).

[26] W. S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, J. Burghartz. Bridging the gap between optical fibers and silicon photonic integrated circuits. Opt. Express, 22, 1277-1286(2014).

[27] R. Marchetti, C. Lacava, A. Khokhar, X. Chen, I. Cristiani, D. J. Richardson, G. T. Reed, P. Petropoulos, P. Minzioni. High-efficiency grating-couplers: demonstration of a new design strategy. Sci. Rep., 7, 16670(2017).

[28] Y. Ding, C. Peucheret, H. Ou, K. Yvind. Fully etched apodized grating coupler on the SOI platform with -0.58  dB coupling efficiency. Opt. Lett., 39, 5348-5350(2014).

[29] D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, R. Baets. Grating couplers for coupling between optical fibers and nanophotonic waveguides. Jpn. J. Appl. Phys., 45, 6071(2006).

[30] G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, J.-M. Fedeli. High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit. Appl. Phys. Lett., 92, 131101(2008).

[31] S. Yang, Y. Zhang, T. Baehr-Jones, M. Hochberg. High efficiency germanium-assisted grating coupler. Opt. Express, 22, 30607-30612(2014).

[32] D. Benedikovic, C. Alonso-Ramos, S. Guerber, X. Le Roux, P. Cheben, C. Dupré, B. Szelag, D. Fowler, É. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, L. Vivien. Sub-decibel silicon grating couplers based on l-shaped waveguides and engineered subwavelength metamaterials. Opt. Express, 27, 26239-26250(2019).

[33] X. Luo, G. Mi, Y. Li, T. Chu. High-efficiency grating coupler based on fast directional optimization and robust layout strategy in 130  nm CMOS process. Opt. Lett., 47, 1622-1625(2022).

[34] D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, L. Vivien. L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography. Opt. Lett., 42, 3439-3442(2017).

[35] C. Alonso-Ramos, P. Cheben, A. Ortega-Moñux, J. Schmid, D.-X. Xu, I. Molina-Fernández. Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95%. Opt. Lett., 39, 5351-5354(2014).

[36] D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, J. Lapointe, S. Janz, R. Halir, A. Ortega-Moñux, J. G. Wangüemert-Pérez, Í. Molina-Fernández, J.-M. Fédéli, L. Vivien, M. Dado. High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure. Opt. Lett., 40, 4190-4193(2015).

[37] X. Chen, C. Li, C. K. Fung, S. M. Lo, H. K. Tsang. Apodized waveguide grating couplers for efficient coupling to optical fibers. IEEE Photonics Technol. Lett., 22, 1156-1158(2010).

[38] D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, B. Lamontagne, S. Wang, J. Lapointe, R. Halir, A. Ortega-Moñux, S. Janz, M. Dado. Subwavelength index engineered surface grating coupler with sub-decibel efficiency for 220-nm silicon-on-insulator waveguides. Opt. Express, 23, 22628-22635(2015).

[39] C. Littlejohns, D. Rowe, H. Du, K. Li, W. Zhang, W. Cao, T. Domínguez Bucio, X. Yan, M. Banakar, D. Tran, S. Liu, F. Meng, B. Chen, Y. Qi, X. Chen, M. Nedeljkovic, L. Mastronardi, R. Maharjan, S. Bohora, G. Reed. Cornerstone’s silicon photonics rapid prototyping platforms: current status and future outlook. Appl. Sci., 10, 8201(2020).

[40] A. Sánchez-Postigo, R. Halir, J. G. Wangüemert-Pérez, A. Ortega-Moñux, S. Wang, M. Vachon, J. H. Schmid, D.-X. Xu, P. Cheben, Í. Molina-Fernández. Breaking the coupling efficiency–bandwidth trade-off in surface grating couplers using zero-order radiation. Laser Photonics Rev., 15, 2000542(2021).

[41] R. Guo, S. Zhang, H. Gao, G. S. Murugan, T. Liu, Z. Cheng. Blazed subwavelength grating coupler. Photonics Res., 11, 189-195(2023).

[42] X. Zhou, H. K. Tsang. Optimized shift-pattern overlay for high coupling efficiency waveguide grating couplers. Opt. Lett., 47, 3968-3971(2022).

[43] J. Notaros, F. Pavanello, M. T. Wade, C. M. Gentry, A. Atabaki, L. Alloatti, R. J. Ram, M. A. Popović. Ultra-efficient CMOS fiber-to-chip grating couplers. Optical Fiber Communications Conference and Exhibition (OFC), 1-3(2016).

[44] B. Zhang, D. Gluhovic, A. Khilo, M. A. Popović. Sub-decibel efficiency, bi-layer, O-band fiber-to-chip grating coupler demonstrated in a 45 nm CMOS foundry platform. CLEO: Science and Innovations, STu5G-4(2022).

[45] V. Vitali, C. Lacava, T. Domnguez Bucio, F. Y. Gardes, P. Petropoulos. Highly efficient dual-level grating couplers for silicon nitride photonics. Sci. Rep., 12, 15436(2022).

[46] W. D. Sacher, Y. Huang, L. Ding, B. J. Taylor, H. Jayatilleka, G.-Q. Lo, J. K. Poon. Wide bandwidth and high coupling efficiency Si₃N₄-on-SOI dual-level grating coupler. Opt. Express, 22, 10938-10947(2014).

[47] J. C. Mak, Q. Wilmart, S. Olivier, S. Menezo, J. K. Poon. Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method. Opt. Express, 26, 13656-13665(2018).

[48] T. Ang, G. Reed, A. Vonsovici, A. Evans, P. Routley, M. Josey. Highly efficient unibond silicon-on-insulator blazed grating couplers. Appl. Phys. Lett., 77, 4214-4216(2000).

[49] V. Vitali, T. Domnguez Bucio, C. Lacava, R. Marchetti, L. Mastronardi, T. Rutirawut, G. Churchill, J. Faneca, J. C. Gates, F. Gardes, P. Petropoulos. High efficiency reflector-less dual-level silicon photonic grating coupler(2023).