Optics and Precision Engineering, Volume. 27, Issue 6, 1293(2019)
Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching
[1] [1] WANG H B, LIN B T, MEI S, et al.. Research development of micro hemispherical resonator gyro (μHRG) technology [J]. Micronanoelectronic Technolog, 2017(5): 772-780.(in Chinese)
[2] [2] SINGH S, NAGOURNEY T, CHO J Y, et al.. Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes [C]. IEEE PLANS 2018, Monterey, USA, 2018: 15-19.
[3] [3] ZHUANG X Y, CHEN B G, WANG X L, et al.. Microsacle polysilicon hemispherical shell resonating gyroscopes with integrated three-dimensional curved electrodes [J]. Journal of Physics: Conf. Series, 2018, 986: 012022.
[4] [4] ZHUANG L Y, WANG X L, LI P H, et al.. Fabrication of 3D spherical electrodes of MEMs hemispherical gyros [J]. Micro-Nano Technology, 2017, XVII-XVIII: 230-235.
[5] [5] SHAO P, C L M, GAO X, et al.. A polysilicon microhemispherical resonating gyroscope [J]. Journal of Microelectromechanical Systems, 2014, 23(4): 762-764.
[6] [6] DAISUKE S, AMIR HEIDARI C Y, NAJAR H, et al.. Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million [J]. Applied Physics Letters, 2016, 108: 051904.
[7] [7] SHAO P, GAO X, AYAZI F. Wineglass-on-a-chip [C]. Proceedings of the Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, CA, USA, 2012: 3-7.
[8] [8] NISHANTH MEHANATHAN V T, SHAO P, SORENSON L, et al.. Invar-36 micro hemispherical shell resonators [C]. IEEE MEMS 2014, San Francisco, USA, 2014: 40-43.
[9] [9] SORENSON X G, AYAZI F. 3-D micromachined hemispherical shell resonators with integrated capacitive transducers [C]. IEEE MEMS 2012, Pairs, France, 2012: 677-680.
[10] [10] PENG SHAO V T, MAYBERRY C L, AYAZI F. A 3D-HARPSS polysilicon microhemispherical shell resonating gyroscope: design, fabrication, and characterization [J].IEEE Sensors Journal, 2015, 15(9): 4974-4985.
[11] [11] HEIDARI M-L C, YANG H A, JARAMILLO G, et al.. Micromachined polycrystalline diamond hemispherical shell resonators [J]. IEEE Transducer 2013, Barcelona, SPAIN, 2013: 2415-2418.
[12] [12] LI T, VISVANATHAN K, GIANCHANDANI Y B. A batch-mode micromachining process for spherical structures [J]. Journal of Micromechanics and Microengineering, 2014, 24(2): 025002.
[13] [13] PRADEEP P, CHOWDHURY F K, POURZAND H, et al.. Fabrication and testing of hemispherical MEMS wineglass resonators [C]. IEEE MEMS 2013, Taipei, 2013: 677-680.
[14] [14] JONATHAN J, BERNSTEIN M G B, JOSEPH M B.High Q diamond hemispherical resonators: fabrication and energy loss mechanisms [J]. J. Micromech. Microeng., 2015 (25): 085006.
[15] [15] LIU ZH G, AN J, WANG J Q, et al.. Silicon etching in HF/HNO3/NH3·H2O/H2O system [J]. Journal of the Electrochemical Society, 2007, 154(1): D21-D29.
[17] [17] PAI F K C, CARLOS H, MASTRANGELO, et al.. MEMS-based hemispherical resonator gyroscopes [C]. IEEE MEMS 2012, Pairs, France, 2012: 978-1-4577-1767.
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ZHUANG Xu-ye, CHEN Bing-gen, LI Ping-hua, WANG Xin-long, CAO Wei-da, DING Jing-bing. Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching[J]. Optics and Precision Engineering, 2019, 27(6): 1293
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Received: Dec. 18, 2018
Accepted: --
Published Online: Jul. 29, 2019
The Author Email: Xu-ye ZHUANG (zxye8888@163.com)