Optics and Precision Engineering, Volume. 27, Issue 6, 1293(2019)
Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching
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ZHUANG Xu-ye, CHEN Bing-gen, LI Ping-hua, WANG Xin-long, CAO Wei-da, DING Jing-bing. Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching[J]. Optics and Precision Engineering, 2019, 27(6): 1293
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Received: Dec. 18, 2018
Accepted: --
Published Online: Jul. 29, 2019
The Author Email: Xu-ye ZHUANG (zxye8888@163.com)
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