Acta Photonica Sinica, Volume. 50, Issue 12, 1212001(2021)

Scanning Angle Compensation of MEMS Mirror Applied in Monocular 3D Camera

Huijun YU1...2, Xiaoguang LI2 and Wenjiang SHEN2,* |Show fewer author(s)
Author Affiliations
  • 1School of Nano-tech and Nano-bionics, University of Science and Technology of China, Hefei 230026, China
  • 2Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences , Suzhou , Jiangsu 215123, China
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    References(16)

    [1] Wei XING, Fumin ZHANG, Wei FENG et al. Three-dimensional measurement method of objects with specular surface based on digital micromirror device. Acta Optica Sinica, 37, 1212002(2017).

    [2] Xianyu SU, Qican ZHANG, Wenjing CHEN. Three-dimensional imaging based on structured illumination. Chinese Journal of Lasers, 41, 0209001(2014).

    [3] Dongliang ZHENG, DA Feipeng. Double-step phase-shifting algorithm for fringe-projection measurement. Acta Optica Sinica, 32, 86-92(2012).

    [15] G JOHNS. Modeling piezoresistivity in silicon and polysilicon. Journal of Applied and Engineering Mathematics, 1-5(2006).

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    Huijun YU, Xiaoguang LI, Wenjiang SHEN. Scanning Angle Compensation of MEMS Mirror Applied in Monocular 3D Camera[J]. Acta Photonica Sinica, 2021, 50(12): 1212001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 21, 2021

    Accepted: Aug. 16, 2021

    Published Online: Jan. 25, 2022

    The Author Email: SHEN Wenjiang (wjshen2011@sinano.ac.cn)

    DOI:10.3788/gzxb20215012.1212001

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