Fig. 1. The basic structure of MEMS micromirror with integrated piezoresistive sensor

Fig. 2. Crystal orientation of piezoresistive element and torsion beam

Fig. 3. The relationship between piezoresistive coefficient and impurity concentrations

Fig. 4. Projection optical engine and projection stripe pattern

Fig. 5. Monocular 3D camera measures the distance between the camera and the white wall（open-loop control MEMS scanner）

Fig. 6. The relationship between the FOV and the temperature （open-loop control）

Fig. 7. Measure system of the piezoresistive sensor performance

Fig. 8. Output amplitude of piezoresistive sensor at different scan angle FOV（input voltage 3.3 V）

Fig. 9. Piezoresistive output and temperature calibration system

Fig. 10. The relationship between the piezoresitive output amplitude and the temperature

Fig. 11. The control logic block diagram of scanning angle of MEMS micromirror

Fig. 12. The relationship between the FOV of MEMS scanning angle and the temperature （open-loop control and closed-loop control）

Fig. 13. Monocular 3D camera

Fig. 14. Monocular 3D camera measures the distance between the camera and the white wall