[1] [1] ZHANG Y, JIN CH SH, MA D M, et al.. Alignment technology for double-fiber phase-shifting point diffraction interferometer ［J］. Infrared and Laser Eng., 2014, 43(1): 145-150. (in Chinese)

[2] [2] VANWINGERDEN J, FRANKENA H, SMORENBURG C. Linear approximation for measurement errors in phase shifting interferometry ［J］. Appl. Opt., 1991, 30(19): 2718-2729.

[3] [3] XU S A, XIE M, SUN J, et al.. Long range nano-positioning system based on optoelectronic phase-shift for piezoelectric actuator ［J］. Opt. Precision Eng., 2014, 22(10): 2773-2778. (in Chinese)

[4] [4] LIU J, MIAO E L, QU Y, et al.. Measurement of optical surface based on intensity self-calibration phase-shift algorithm ［J］. Opt. Precision Eng., 2014, 22(8): 2007-2013. (in Chinese)

[5] [5] OREB B F, FARRANT D I, WALSH C J, et al.. Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer ［J］. Appl. Opt., 2000, 39(28):5161-5171.

[6] [6] YU Y L, TAN L, ZOU L G, et al.. Piezoelectric ceramic characteristics using fiber grating sensor ［J］. Acta Photonica Sinica, 2011, 40(7): 994-997. (in Chinese)

[7] [7] DENG Y, LIU N, CAO H B, et al.. Nd:YAG laser feedback interference effects based PZT precision measurement technology and system ［J］. Infrared and Laser Eng., 2014, 43(10): 3434-3438. (in Chinese)

[8] [8] XU J, LI Y, WANG H, et al.. Phase-shift extraction for phase-shifting interferometry by histogram of phase difference ［J］. Opt. Express, 2010, 18(23): 24368-24378.

[9] [9] GUO H, ZHANG Z. Phase shift estimation from variances of fringe pattern differences ［J］. Appl. Opt., 2013, 52(26): 6572-6578.

[10] [10] GUO H, YU Y, CHEN M. Blind phase shift estimation in phase-shifting interferometry ［J］. J. Opt. Soc. Am. A, 2007, 24(1): 25-33.

[11] [11] GAO P, YAO B, LINDLEIN N, et al.. Phase-shift extraction for generalized phase-shifting interferometry ［J］. Opt. Lett., 2009, 34(22): 3553-3555.

[12] [12] WANG Z, HAN B. Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms ［J］. Opt. Lett., 2004, 29(14): 1671-1673.

[13] [13] LIU Q, WANG Y, HE J G, et al.. Phase shift extraction and wavefront retrieval from interferograms with background and contrast fluctuations ［J］. J. Opt., 2015, 17: 025704.

[14] [14] ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting interferometric measurement ［J］. Opt. Precision Eng., 2013, 21(5): 1116-1121. (in Chinese)

[15] [15] HAO Q, ZHU Q D, HU Y, et al.. A light intensity correction method to open annular light intensity monitoring area in the outer interference pattern, China: CN 101482394 B［P］. 2010.