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Optics and Precision Engineering, Volume. 24, Issue 10, 2565(2016)

Phase shift extraction algorithm with error estimation in phase-shifting interferometry

LIU Qian1... YUAN Dao-cheng1,2 and HE Jian-guo1 |Show fewer author(s)
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    LIU Qian, YUAN Dao-cheng, HE Jian-guo. Phase shift extraction algorithm with error estimation in phase-shifting interferometry[J]. Optics and Precision Engineering, 2016, 24(10): 2565

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    Received: May. 6, 2016

    Accepted: --

    Published Online: Nov. 23, 2016

    The Author Email:

    DOI:10.3788/ope.20162410.2565

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology