Photonic Sensors, Volume. 5, Issue 3, 202(2015)
Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor
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[in Chinese], [in Chinese]. Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor[J]. Photonic Sensors, 2015, 5(3): 202
Category: Regualr
Received: Jan. 8, 2015
Accepted: Mar. 18, 2015
Published Online: Oct. 22, 2015
The Author Email: (suja@nitc.ac.in)