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Photonic Sensors, Volume. 5, Issue 3, 202(2015)

Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor

[in Chinese]* and [in Chinese]
Author Affiliations
  • Department of ECE, National Institute of Technology, Calicut, India
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    [in Chinese], [in Chinese]. Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor[J]. Photonic Sensors, 2015, 5(3): 202

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    Paper Information

    Category: Regualr

    Received: Jan. 8, 2015

    Accepted: Mar. 18, 2015

    Published Online: Oct. 22, 2015

    The Author Email: (suja@nitc.ac.in)

    DOI:10.1007/s13320-015-0239-y

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology