Optics and Precision Engineering, Volume. 17, Issue 1, 166(2009)
Application of ultrasonic technology to wet etching of silicon
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ZENG Yi-bo, WANG Ling-yun, GU Dan-dan, SUN Dao-heng. Application of ultrasonic technology to wet etching of silicon[J]. Optics and Precision Engineering, 2009, 17(1): 166
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Received: Mar. 26, 2008
Accepted: --
Published Online: Oct. 9, 2009
The Author Email: Yi-bo ZENG (zyb2005@xmu.edu.cn)
CSTR:32186.14.
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