Optics and Precision Engineering, Volume. 17, Issue 1, 166(2009)

Application of ultrasonic technology to wet etching of silicon

ZENG Yi-bo1,*... WANG Ling-yun2, GU Dan-dan1 and SUN Dao-heng2 |Show fewer author(s)
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    ZENG Yi-bo, WANG Ling-yun, GU Dan-dan, SUN Dao-heng. Application of ultrasonic technology to wet etching of silicon[J]. Optics and Precision Engineering, 2009, 17(1): 166

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    Paper Information

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    Received: Mar. 26, 2008

    Accepted: --

    Published Online: Oct. 9, 2009

    The Author Email: Yi-bo ZENG (zyb2005@xmu.edu.cn)

    DOI:

    CSTR:32186.14.

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