Fig. 1. Linear dynamic model of the piezoelectric positioning platform

Fig. 2. Experimental equipment of piezoelectric positioning platform based on dSPACE

Fig. 3. Inverse compensation results of the MPI hysteresis inverse model

Fig. 4. Comparison of tracking errors after MPI inverse compensation and PI inverse compensation

Fig. 5. Identification results of the linear dynamic model for the piezo-positioning platform

Fig. 6. Nominal models and system frequency response at five different frequencies

Fig. 7. Upper-bound frequency response of model uncertainty

Fig. 8. Line chart of the error variation between load changes and the nominal model at different frequencies

Fig. 9. Control block diagram of DOB

Fig. 10. Feedback control block diagram with diagonal structured uncertainties

Fig. 11. Disturbance rejection curves of the three methods

Fig. 12. System output curves under disturbances with different frequency sinusoidal signals

Fig. 13. System output curves under disturbances with composite frequency signals

Fig. 14. Tracking comparison under no-load and load conditions with a 70 Hz sinusoidal signal