Optics and Precision Engineering, Volume. 18, Issue 1, 197(2010)
MEMS nodal modeling and its application to design of integrated microsystems
[1] [1] SENTURIA S D. CAD challenges for microsensors, microactuators, and microsystems [C]. Proceedings of the IEEE, 1998,86(8):1611-1626.
[3] [3] SCHWARZ P, HAASE J. Behavioral modeling of complex heterogeneous microsystems [C].Proc. 1st Intern. Forum on Design Languages(FDL’98), Lausanne: Swiss Federal Institute of Technology, 1998,2:53-62.
[6] [6] JAKOVLJEVIC M,FOTIU P,MRCARICA Z,et al.. A system-level simulation of complex multi-domain microsystems by using analogy hardware description languages [J]. Sensors and Actuators A, 2002,82:30-39.
[7] [7] MUKHERJEE T,FEDDER G K,RAMASWAMY D, et al.. Emerging simulation approaches for micromachined devices [J]. IEEE Transactions on Computer-aided Design of Integrated Circuits and Systems, 2000,19(12):1572-1589.
[8] [8] ZHOU G Y,PHILIP D. A method to include micromechanical components into the system level simulation [J]. Sensors and Actuators A, 2002,97-98:386-397.
[9] [9] SUN ZH X, HUANG Q A, LI W H. VHDl-AMS macromodels of MEMS devices [J]. Micronanoelectronic Technology, 2003(5):33-36. (in Chinese)
[10] [10] TILMANS H A C. Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems[J]. J. Micromech. Microeng, 1996,6:157-176.
[11] [11] TARIK B,JEAN-PAUL G. Modeling micropumps with electrical equivalent networks[J]. J. Micromech. Microeng, 1996,6:398-404.
[12] [12] RONG H, HUANG Q A, LI W H. An equivalent circuit macromodel for a MEMS beam and F-I analogy[J]. Chinese Journal of Semiconductor, 2003,24(5):528-532. (in Chinese)
[13] [13] WANG Y Q,CHEN H L,HE X M. System-level modeling and simulation for an electrostatic-feedback micro-accelerometer based on equivalent electrical representation[J]. Micorsystem Technologies, 2007,13:613-624.
[14] [14] FEDDER G K. Structured design of integratedMEMS[C]. Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems, Orlando, 1999:1-8.
[15] [15] CLARK J V,ZHOU N, BINDEL D, et al.. 3D MEMS simulation modeling using modified nodal analysis [C]. Proceedings of the Micro-scale Systems: Mechanics and Measurements Symposium, Orlando FL, USA, 2000:68-75.
[16] [16] XIAO ZH Y, YANG ZH CH, ZHANG H X, et al.. Nodal model simulation of a accelerometer[J]. Acta Scientiarum Naturalium Universitatis Pekinensis, 2004,40(3):432-436. (in Chinese)
[17] [17] SHAN B G, LIU Y B, WEI H L. Modeling and simulation of micor-silicon accelerometer[J]. Journal of Functinal Materials and Devices, 2006,12(15):399-403. (in Chinese)
[18] [18] YANG H ZH, LUO R, WANG H. Modeling Methodology for System-on-chip[M]. Beijing:Tsinghua University Press,2003. (in Chinese)
[19] [19] WANG Y Q. Systematic design and key techniques of complex MEMS for a comb-finger micromachined accelerometer[D]. Xi’an: Xi’an Jiaotong University, 2007. (in Chinese)
[20] [20] TILMANS H A C. Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems[J]. J. Micromech. Microeng, 1997,7:285-309.
[21] [21] WEN F N, LI W H, HUANG Q A, et al..Large-signal lumped-parameter macromodels for equivalent circuit representation of electromechanical transducers[J]. J. Micromech. Microeng, 2004,14:452-461.
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WANG Yong-quan, CHEN Hua-ling, PENG Bei, ZHU Zi-cai. MEMS nodal modeling and its application to design of integrated microsystems[J]. Optics and Precision Engineering, 2010, 18(1): 197
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Received: Feb. 18, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Yong-quan WANG (yongquanwang@gmail.com)
CSTR:32186.14.