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Optics and Precision Engineering, Volume. 18, Issue 1, 197(2010)

MEMS nodal modeling and its application to design of integrated microsystems

WANG Yong-quan1,*... CHEN Hua-ling1, PENG Bei2 and ZHU Zi-cai1 |Show fewer author(s)
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    WANG Yong-quan, CHEN Hua-ling, PENG Bei, ZHU Zi-cai. MEMS nodal modeling and its application to design of integrated microsystems[J]. Optics and Precision Engineering, 2010, 18(1): 197

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    Paper Information

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    Received: Feb. 18, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Yong-quan WANG (yongquanwang@gmail.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology