Optics and Precision Engineering, Volume. 24, Issue 12, 3048(2016)

Flatness measurement of pitch lap for large continuous polisher

WANG Zhe1...2, XU Xue-ke1,2, SHAO Jian-da1,2, DUN Ai-huan1,2, YANG Ming-hong1,2, FAN Yong-tao1, FANG Yuan-yuan1,2, GAO Wen-lan1,2 and LIU Fang3 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(13)

    [1] [1] LIU D. Study on transmission characteristics of high power laser in intermediate frequency range[D].Mianyang:China Academy of Engineering Physics,2013.(in Chinese)

    [2] [2] LIU X S. Research on detecting technology of continuous polishing on line surface[D].Nanjing:Nanjing University of Science and Techenlogy,2014.(in Chinese)

    [4] [4] XIE L,MA P,LIU Y B,et al.. Annular lapping of large-aperture reflective component[J].High Power Laser and Particle Beams, 2012, 24(7):1687-1690. (in Chinses)

    [5] [5] SHAN H Y, XU X K, HE H B,et al.. Friction properties between phosphate laser glass and optical polishing pitch[J]. Chinese Journal of aser,2013,40(4):147-153. (in Chinses)

    [6] [6] SUN W J. Research on detecting technology of flatness of large workpiece [D]. Changchun:Changchun University of Science and Technology,2003. (in Chinses)

    [8] [8] LIU L H, ZHANG ZH, ZHANG SH ZH. Comparison of several measuring methods of flatness of large plane[J]. Journal of Astronaueic Metrology and Measurement, 1998,18(6):39-42. (in Chinses)

    [10] [10] CHEN J.Research on real-time surface monitoring of polishing pad in continuous polishing [D].Beijing: Graduate University of Chinese Academy of Sciences,2015. (in Chinses)

    [12] [12] FANG B,ZOU K,MENG J,et al..A new measuring method for flatness of large plane[J].Machine Tool & Hydraulics, 2012, 40(18):22-24. (in Chinses)

    [13] [13] ZHOU H. Error analysis and improved application of linear data fitting method[J].College Mathematics, 2013, 29(1):70-76.(in Chinses)

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    WANG Zhe, XU Xue-ke, SHAO Jian-da, DUN Ai-huan, YANG Ming-hong, FAN Yong-tao, FANG Yuan-yuan, GAO Wen-lan, LIU Fang. Flatness measurement of pitch lap for large continuous polisher[J]. Optics and Precision Engineering, 2016, 24(12): 3048

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    Paper Information

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    Received: Oct. 18, 2016

    Accepted: --

    Published Online: Jan. 23, 2017

    The Author Email:

    DOI:10.3788/ope.20162412.3048

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