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Optics and Precision Engineering, Volume. 24, Issue 12, 3048(2016)

Flatness measurement of pitch lap for large continuous polisher

WANG Zhe1...2, XU Xue-ke1,2, SHAO Jian-da1,2, DUN Ai-huan1,2, YANG Ming-hong1,2, FAN Yong-tao1, FANG Yuan-yuan1,2, GAO Wen-lan1,2 and LIU Fang3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    WANG Zhe, XU Xue-ke, SHAO Jian-da, DUN Ai-huan, YANG Ming-hong, FAN Yong-tao, FANG Yuan-yuan, GAO Wen-lan, LIU Fang. Flatness measurement of pitch lap for large continuous polisher[J]. Optics and Precision Engineering, 2016, 24(12): 3048

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    Received: Oct. 18, 2016

    Accepted: --

    Published Online: Jan. 23, 2017

    The Author Email:

    DOI:10.3788/ope.20162412.3048

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology