Optics and Precision Engineering, Volume. 31, Issue 21, 3111(2023)
Real-time spatial error measurement of two-dimensional linear module
[1] [1] 王斐然, 廖有用, 罗均, 等. 二维直线运动平台几何误差建模与数字化分析[J]. 机械设计与制造, 2018(2): 160-163. doi: 10.3969/j.issn.1001-3997.2018.02.047WANGF R, LIAOY Y, LUOJ, et al. Modeling and digital analysis of the geometric errors of two-dimensional linear motion stage[J]. Machinery Design & Manufacture, 2018(2): 160-163.(in Chinese). doi: 10.3969/j.issn.1001-3997.2018.02.047
[2] [2] 杨滨赫, 蔡引娣, 文志祥, 等. 长距离激光测量中光束漂移的自动补偿[J]. 光学 精密工程, 2020, 28(11): 2393-2402. doi: 10.37188/OPE.20202811.2393YANGB H, CAIY D, WENZH X, et al. Automatic compensation method for beam drift in long-distance laser measurement[J]. Opt. Precision Eng., 2020, 28(11): 2393-2402.(in Chinese). doi: 10.37188/OPE.20202811.2393
[3] [3] 范光照, 朱志良, 钟添东. 小型微/纳米级三坐标测量机的研制[J]. 纳米技术与精密工程, 2003, 1(1):17-23. doi: 10.3969/j.issn.1672-6030.2003.01.004FANG ZH, ZHUZH L, ZHONGT D. Development of a small coordinate measuring machine with micro/nano-accuracy[J]. Nanotechnology and Precision Engineering, 2003, 1(1):17-23.(in Chinese). doi: 10.3969/j.issn.1672-6030.2003.01.004
[4] [4] 赵东升, 张健, 贾敏强, 等. 测量数控机床定位误差的两种方法之比较[J]. 计量学报, 2019, 40(S1):33-35. doi: 10.3969/j.issn.1000-1158.2019.z1.07ZHAOD SH, ZHANGJ, JIAM Q, et al. Comparison of two methods for measuring the error of CNC machine tool[J]. Acta Metrologica Sinica, 2019, 40(S1):33-35.(in Chinese). doi: 10.3969/j.issn.1000-1158.2019.z1.07
[5] [5] 李永祥, 焦万堂, 武文斌. 机床导轨误差对零件加工精度的影响[J]. 制造技术与机床, 2005(8): 82-85. doi: 10.3969/j.issn.1005-2402.2005.08.023LIY X, JIAOW T, WUW B. Influence of lathe guide errors on machining accuracy[J]. Manufacturing Technology & Machine Tool, 2005(8): 82-85.(in Chinese). doi: 10.3969/j.issn.1005-2402.2005.08.023
[6] P S HUANG, Y LI. Laser measurement instrument for fast calibration of machine tools, 14, 644-647(1996).
[7] [7] 郭俊康, 李鑫波, 李勰. 导轨五自由度运动误差的光学与倾角传感器组合测量方法[J]. 西安交通大学学报, 2021, 55(2):64-72. doi: 10.7652/xjtuxb202102008GUOJ K, LIX B, LIX. Five degrees of freedom simultaneous measurement of linear motion system by combination of optical with inclination sensors[J]. Journal of Xi'an Jiaotong University, 2021, 55(2):64-72.(in Chinese). doi: 10.7652/xjtuxb202102008
[8] J CHENG, J F CHEN, Z CHENG et al. Interferometer with six axes and.
[9] D CHANG, P C HU, J B TAN. Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer. Frontiers of Information Technology & Electronic Engineering, 22, 1677-1684(2021).
[10] Y Q ZHAO, Q B FENG, B ZHANG et al. Influence of beam radii on a common-path compensation method for laser beam drifts in laser collimation systems. Measurement Science and Technology, 27(2016).
[11] [11] 匡萃芳, 冯其波, 刘斌. 滚转角测量方法综述[J]. 光学技术, 2004, 30(6): 699-702. doi: 10.3321/j.issn:1002-1582.2004.06.010KUANGC F, FENGQ B, LIUB. Survey of rolling angle measurement methods[J]. Optical Technique, 2004, 30(6): 699-702.(in Chinese). doi: 10.3321/j.issn:1002-1582.2004.06.010
[12] Y D CAI, B H YANG, K C FAN. Robust roll angular error measurement system for precision machines. Optics Express, 27, 8027(2019).
[13] Q B FENG, B ZHANG, C X CUI et al. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide. Optics Express, 21, 25805-25819(2013).
[14] [14] 张聪, 刘文正, 段发阶, 等. 长导轨五自由度测量中直线度精度提升方法与优化设计[J]. 光学 精密工程, 2022, 30(20):2467-2478. doi: 10.37188/OPE.20223020.2467ZHANGC, LIUW ZH, DUANF J, et al. Accuracy improvement method and optimal design of straightness in five-degreee-of-freedom measurement of long guide[J]. Opt. Precision Eng., 2022, 30(20):2467-2478.(in Chinese). doi: 10.37188/OPE.20223020.2467
[15] [15] 张忠宁, 宋治崑, 范宇超, 等. 五自由度运动误差测量系统关键技术研究[J]. 计测技术, 2021, 41(3):39-45. doi: 10.11823/j.issn.1674-5795.2021.03.08ZHANGZH N, SONGZH K, FANY CH, et al. Research on key technology of five-degree-of-freedom motion error measurement system[J]. Metrology & Measurement Technology, 2021, 41(3):39-45.(in Chinese). doi: 10.11823/j.issn.1674-5795.2021.03.08
[16] T JIN, M Y HAN, J L LIU et al. A heterodyne interferometer for simultaneous measurement of roll and straightness. IEEE Access, 7, 133257-133264(2019).
[17] [17] 匡翠方, 冯其波, 张斌, 等. 一种新的滚转角测量方法[J]. 光电子·激光, 2006, 17(4):1085-1089.KUANGC F, FENGQ B, ZHANGB, et al. A novel method for measuring roll[J]. Journal of Optoelectronics·Laser, 2006, 17(4):1085-1089. (in Chinese)
[18] K SHI, J H SU, W M HOU. Roll angle measurement system based on differential plane mirror interferometer. Optics Express, 26, 19826(2018).
[19] K C FAN, M J CHEN, W M HUANG. A six-degree-of-freedom measurement system for the motion accuracy of linear stages. International Journal of Machine Tools and Manufacture, 38, 155-164(1998).
[20] Y C FAN, Z F LOU, Y B HUANG et al. Self-compensation method for dual-beam roll angle measurement of linear stages. Optics Express, 29, 26340(2021).
[21] [21] 粟时平, 李圣怡, 王贵林. 基于多体系统理论的数控机床空间误差建模[J]. 长沙电力学院学报(自然科学版), 2001(4): 75-78.SUSH P, LISH Y, WANGG L. Modeling of volumetric errors for NC machine tools based on multi-body system theories[J]. Journal of Changsha Electric Power University (Natural Science Edition), 2001(4): 75-78.(in Chinese)
[22] [22] 赵壮, 娄志峰, 张忠宁, 等. 符合阿贝原则的数控机床几何误差建模[J]. 光学 精密工程, 2020, 28(4): 885-897.ZHAOZH, LOUZH F, ZHANGZH N, et al. Geometric error model of CNC machine tools based on Abbe principle[J]. Optics and Precision Engineering, 2020, 28(4): 885-897.(in Chinese)
[23] Y B HUANG, K C FAN, W SUN et al. Low cost, compact 4-DOF measurement system with active compensation of beam angular drift error. Optics Express, 26, 17185-17198(2018).
[24] [24] 宋治崑. 导轨运动误差测量方法及装备空间误差分析[D]. 大连: 大连理工大学, 2022.SONGZH K. Measurement Method of Guide Rail Motion Error and Analysis of Equipment Space Error[D]. Dalian: Dalian University of Technology, 2022. (in Chinese)
Get Citation
Copy Citation Text
Zhifeng LOU, Hanping ZHANG, Jingjie ZHOU, Jiyun ZHANG, Jun QIAN, Guangchao FAN. Real-time spatial error measurement of two-dimensional linear module[J]. Optics and Precision Engineering, 2023, 31(21): 3111
Category:
Received: Feb. 27, 2023
Accepted: --
Published Online: Jan. 5, 2024
The Author Email: ZHANG Hanping (18437952875@163.com)