Fig. 1. Installation diagram of single-axis measuring system

Fig. 2. Measuring principle for four-degrees-of freedom

Fig. 3. Measuring principle for roll error

Fig. 4. Two-dimensional linear module assembly

Fig. 5. Setting of two-dimensional linear module and low-order volume coordinate system

Fig. 6. Error conversion diagram based on abbe-bryan principle

Fig. 7. Error calibration of plane mirror system

Fig. 8. Comparison of X axial positioning error

Fig. 9. Comparison of Z axial positioning error

Fig. 10. Devices for comparison of X axial straightness error

Fig. 11. Comparison results of X axial straightness error

Fig. 12. Devices for comparison of Z axial straightness error

Fig. 13. Comparison results of Z axial straightness error

Fig. 14. Device for comparison of X axial angular errors

Fig. 15. Comparison results of X axial angular errors

Fig. 16. Device for comparison of Z axial angular errors

Fig. 17. Comparison results of Z axial angular errors

Fig. 18. Comparison of X axial roll error

Fig. 19. Comparison of Z axial roll error

Fig. 20. Schematic diagram of XZ plane diagonal position measurement

Fig. 21. Measuring devices of XZ plane diagonal position

Fig. 22. Comparison of diagonal position measurement error of XZ plane