Acta Optica Sinica, Volume. 17, Issue 12, 1756(1997)

Two-Mirror Aspheric Optical System for Soft X-Ray Lithography with Nonscanning Mode

[in Chinese] and [in Chinese]
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    References(6)

    [2] [2] Tanya E. Jewell, J. Michael Rodgers, Kerin P. Thompson. Reflective systems design study for soft X-ray projection lithography. J. Vac. Sci. Technol. (B), 1990, 8(6): 1519~1523

    [3] [3] K. Schwarzchild. Theorieder Spiegeltelskop. Astron. Mitth. Konigl Sternwarte zu Gottingen. 1905, 10: 20~27

    [4] [4] Kenji Kurihara, Hiroo Kinoshita, Tsutanic Mizota et al.. Two-mirror telecentric optics for soft X-ray reduction lithography. J. Vac. Sci. Technol. (B), 1991, 9(6): 3189~3192

    [5] [5] I. M. Egdall. Manufacture of a three-mirror wide-field optical system. Opt. Engng., 1985, 24(2): 285~289

    [6] [6] W. B. Wetherell, Daniel H. Schuite, David A. Womble. New optical configurations for wide-field telescopes. Proc. Opt. and IR. Telescopes for the 1990s. Ⅱ (Kitt Peak Nationa Observatory), 1980: 878~895

    [7] [7] I. R. Abel, M. R. Hatch. The pursuit of symmetry in wide-angle reflective optical degsin. Proc. SPIE, 1980, 237: 271~280

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    [in Chinese], [in Chinese]. Two-Mirror Aspheric Optical System for Soft X-Ray Lithography with Nonscanning Mode[J]. Acta Optica Sinica, 1997, 17(12): 1756

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    Paper Information

    Category: Optical Devices

    Received: --

    Accepted: --

    Published Online: Oct. 31, 2006

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