Acta Optica Sinica, Volume. 17, Issue 12, 1756(1997)
Two-Mirror Aspheric Optical System for Soft X-Ray Lithography with Nonscanning Mode
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[in Chinese], [in Chinese]. Two-Mirror Aspheric Optical System for Soft X-Ray Lithography with Nonscanning Mode[J]. Acta Optica Sinica, 1997, 17(12): 1756
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