Optics and Precision Engineering, Volume. 32, Issue 9, 1293(2024)

Research developments of extreme ultra-violet multilayers for 40-90 nm

Bo LAI... Li JIANG, Runze Qi and Zhanshan WANG* |Show fewer author(s)
Author Affiliations
  • MOE Key Laboratory of Advanced Micro-structured Materials of Ministry of Education, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering Tongji University, Shanghai200092, China
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    Bo LAI, Li JIANG, Runze Qi, Zhanshan WANG. Research developments of extreme ultra-violet multilayers for 40-90 nm[J]. Optics and Precision Engineering, 2024, 32(9): 1293

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    Received: Apr. 17, 2024

    Accepted: --

    Published Online: Jun. 2, 2024

    The Author Email: WANG Zhanshan (wangzs@tongji.edu.cn)

    DOI:10.37188/OPE.20243209.1293

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