Fig. 1. Extinction coefficient of commonly used materials in EUV range

Fig. 2. Extinction coefficient of tested Lanthanide elements in EUV range

Fig. 3. Peak reflectivity of Mg/SiC， Mg/Al and Mg/Mo multilayers in 40-90 nm range

Fig. 4. Peak reflectivity of Si/Sc， Al/Sc， Si/Al/Sc and Mo/Al/Sc multilayers

Fig. 5. Peak reflectivity of various multilayers in 40-90 nm