Piezoelectrics & Acoustooptics, Volume. 42, Issue 1, 47(2020)

Wireless Bonding Package Based on Low Temperature Co-fired Ceramics

JIAO Jingjing1,*... SHI Yunbo1, ZHAO Yongqi1, ZHAO Sihan1, ZHANG Jie1, MI Zhenguo1 and KANG Qiang2 |Show fewer author(s)
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  • 2[in Chinese]
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    To improve the reliability of MEMS accelerometers, reduce sensor failures caused by wire bonding breakage, a wireless bonding package based on low temperature co-fired ceramics (LTCC) is designed in this paper. The package uses an anodic bonding technique to connect the LTCC substrate to the chip,and simultaneously integrates the circuit transfer board synchronously.This package structure can reduce the package size of the sensor and effectively improve the reliability of the MEMS accelerometers.

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    JIAO Jingjing, SHI Yunbo, ZHAO Yongqi, ZHAO Sihan, ZHANG Jie, MI Zhenguo, KANG Qiang. Wireless Bonding Package Based on Low Temperature Co-fired Ceramics[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 47

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    Paper Information

    Received: Jul. 8, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email: Jingjing JIAO (s1706152@st.nuc.edu.cn)

    DOI:10-11977/j.issn.1004-2474.2020-01-012

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