Optics and Precision Engineering, Volume. 31, Issue 20, 2964(2023)
Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage
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Jinfu SIMA, Leijie LAI, Pengzhi LI, Yu FANG, Limin ZHU. Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage[J]. Optics and Precision Engineering, 2023, 31(20): 2964
Category: Micro/Nano Technology and Fine Mechanics
Received: May. 11, 2023
Accepted: --
Published Online: Nov. 28, 2023
The Author Email: LAI Leijie (fangyu_hit@126.com), FANG Yu (fangyu_hit@126.com)