Optics and Precision Engineering, Volume. 31, Issue 20, 2964(2023)

Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage

Jinfu SIMA1... Leijie LAI1,*, Pengzhi LI2,3, Yu FANG1,* and Limin ZHU4 |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai20620, China
  • 2School of Computing and Engineering, University of Gloucestershire, CheltenhamGL50 RH, UK
  • 3Changchun Institute of Optic, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun100, China
  • 4State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai20020, China
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    References(14)

    [1] [1] 刘永凯, 吕福睿, 高世杰, 等. 地基大口径望远镜动态目标跟踪中压电式快速反射镜迟滞效应的补偿[J]. 光学 精密工程, 2022, 30(23): 3081-3089. doi: 10.37188/ope.20223023.3081LIUY K, LÜF R, GAOS J, et al. Compensation of hysteresis effect of piezoelectric fast steering mirror in dynamic target tracking of ground-based large aperture telescope system[J]. Opt. Precision Eng., 2022, 30(23): 3081-3089.(in Chinese). doi: 10.37188/ope.20223023.3081

    [2] C M LIANG, F J WANG, Z C HUO et al. A 2-DOF monolithic compliant rotation platform driven by piezoelectric actuators. IEEE Transactions on Industrial Electronics, 67, 6963-6974(2020).

    [3] [3] 王耿, 魏维宁, 代军, 等. 线性偏摆复合型压电微动平台[J]. 光学 精密工程, 2022, 30(9): 1058-1070. doi: 10.37188/OPE.20223009.1058WANGG, WEIW N, DAIJ, et al. Linear yaw compound piezoelectric micro-motion platform[J]. Opt. Precision Eng., 2022, 30(9): 1058-1070.(in Chinese). doi: 10.37188/OPE.20223009.1058

    [4] [4] 黄涛, 罗治洪, 陶桂宝, 等. 压电定位平台Hammerstein建模与反馈线性化控制[J]. 光学 精密工程, 2022, 30(14): 1716-1724. doi: 10.37188/OPE.20223014.1716HUANGT, LUOZ H, TAOG B, et al. Hammerstein modeling and feedback linearization control for piezoelectric positioning stage[J]. Opt. Precision Eng., 2022, 30(14): 1716-1724.(in Chinese). doi: 10.37188/OPE.20223014.1716

    [5] [5] 李致富, 黄楠, 钟云, 等. 压电驱动器迟滞非线性的分数阶建模及实验验证[J]. 光学 精密工程, 2020, 28(5): 1124-1131.LIZ F, HUANGN, ZHONGY, et al. Fractional order modeling and experimental verification of hysteresis nonlinearities in piezoelectric actuators[J]. Opt. Precision Eng., 2020, 28(5): 1124-1131.(in Chinese)

    [6] [6] 王贞艳, 贾高欣. 压电陶瓷作动器非对称迟滞建模与内模控制[J]. 光学 精密工程, 2018, 26(10): 2484-2492. doi: 10.3788/ope.20182610.2484WANGZ Y, JIAG X. Asymmetric hysteresis modeling and internal model control of piezoceramic actuators[J]. Opt. Precision Eng., 2018, 26(10): 2484-2492. (in Chinese). doi: 10.3788/ope.20182610.2484

    [7] [7] 顾胜良, 王建平, 胡红专, 等. 基于Preisach模型的光纤定位单元R机构精定位的实现[J]. 光学 精密工程, 2022, 30(18): 2205-2218. doi: 10.37188/OPE.20223018.2205GUS L, WANGJ P, HUH Z, et al. Realization of precise positioning of fiber positioning unit R mechanism based on Preisach model[J]. Opt. Precision Eng., 2022, 30(18): 2205-2218. (in Chinese). doi: 10.37188/OPE.20223018.2205

    [8] [8] 杨晓京, 胡俊文, 李庭树. 压电微定位台的率相关动态迟滞建模及参数辨识[J]. 光学 精密工程, 2019, 27(3): 610-618. doi: 10.3788/ope.20192703.0610YANGX J, HUJ W, LIT S. Rate-dependent dynamic hysteresis modeling of piezoelectric micro platform and its parameter identification[J]. Opt. Precision Eng., 2019, 27(3): 610-618. (in Chinese). doi: 10.3788/ope.20192703.0610

    [9] X H SU, Z LIU, Y ZHANG et al. Event-triggered adaptive fuzzy tracking control for uncertain nonlinear systems preceded by unknown Prandtl–ishlinskii hysteresis. IEEE Transactions on Cybernetics, 51, 2979-2992(2021).

    [10] [10] 张东岳, 王伟国, 张振东, 等. 压电偏摆台的复合控制[J]. 压电与声光, 2017, 39(1): 40-43.ZHANGD Y, WANGW G, ZHANGZ D, et al. Compound control of piezoelectric oscillating table[J]. Piezoelectrics & Acoustooptics, 2017, 39(1): 40-43.(in Chinese)

    [11] MAL JANAIDEH, P KREJČÍ. Inverse rate-dependent Prandtl–ishlinskii model for feedforward compensation of hysteresis in a piezomicropositioning actuator. IEEE/ASME Transactions on Mechatronics, 18, 1498-1507(2012).

    [12] M J YANG, C X LI, G Y GU et al. A rate-dependent Prandtl-Ishlinskii model for piezoelectric actuators using the dynamic envelope function based play operator. Frontiers of Mechanical Engineering, 10, 37-42(2015).

    [13] M S RANA, H R POTA, I R PETERSEN. Approach for improved positioning of an atomic force microscope piezoelectric tube scanner. Micro & Nano Letters, 9, 407-411(2014).

    [14] U BHAGAT, B SHIRINZADEH, L CLARK et al. Experimental investigation of robust motion tracking control for a 2-DOF flexure-based mechanism. IEEE/ASME Transactions on Mechatronics, 19, 1737-1745(2014).

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    Jinfu SIMA, Leijie LAI, Pengzhi LI, Yu FANG, Limin ZHU. Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage[J]. Optics and Precision Engineering, 2023, 31(20): 2964

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: May. 11, 2023

    Accepted: --

    Published Online: Nov. 28, 2023

    The Author Email: LAI Leijie (fangyu_hit@126.com), FANG Yu (fangyu_hit@126.com)

    DOI:10.37188/OPE.20233120.2964

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