Optics and Precision Engineering, Volume. 31, Issue 20, 2964(2023)
Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage
Figures & Tables(15)
Fig. 1. Experimental system of 3-DOFs tip-tilt-piston piezoelectric stage
Fig. 2. Relationship between 3-DOFs motion and output displacements of PZTs
Fig. 3. Coupled hysteresis characteristics when voltage is applied to PZT 1 separately
Fig. 7. Identification results of coupling parameters of PZT 2 to PZT 1
Fig. 9. Comparisons of hysteresis and coupling before and after open-loop compensation of the coupled hysteresis inverse model
Fig. 10. Compound control system with coupled hysteresis inverse model feedforward
Fig. 11. Comparison of ball trajectory tracking results and errors before and after compensation
Table 1. Parameter identification results of PI model
View tableView in ArticleTable 1. Parameter identification results of PI model
PI1 PI2 PI3 α -0.000 7 -0.000 8 -0.001 4 β 0.698 0 0.725 9 0.810 1 p1 0.131 9 0.067 7 0.179 4 p2 0.081 9 0.092 3 0.018 4 p3 0.045 0 0.082 8 0.018 0 p4 0.053 5 0.037 1 0.037 6 p5 0.019 2 0.013 8 0.066 8 p6 0.052 2 0.068 4 0.040 5 p7 0.057 8 0.026 2 0.002 6 p8 0.004 8 0.010 8 0.000 2 p9 0 0.000 2 0.064 6 p10 0.153 7 0.174 7 0.176 2 γ 0.060 0 0.057 9 0.105 9 η 0.063 6 0.069 5 0.204 8
Table 2. Coupling parameter identification results
View tableView in ArticleTable 2. Coupling parameter identification results
Cij j=1 j=2 j=3 i=1 1.000 0 0.005 5 0.007 6 i=2 0.002 7 1.000 0 0.004 7 i=3 0.007 6 0.002 1 1.000 0
Table 3. Root mean square error of coupling model and actual coupling
View tableView in ArticleTable 3. Root mean square error of coupling model and actual coupling
eR（Cij） j=1 j=2 j=3 i=1 / 0.029 9 0.033 1 i=2 0.044 0 / 0.028 3 i=3 0.043 9 0.033 1 /
Table 4. Parameter identification results of PI inverse model
View tableView in ArticleTable 4. Parameter identification results of PI inverse model
PI-1 1 PI-1 2 PI-1 3 α 0.002 0 0.002 1 0.001 8 β 1.291 0 1.216 2 1.238 1 p1 -0.136 5 0 0 p2 -0.150 1 -0.281 9 -0.288 9 p3 -0.129 8 -0.044 7 -0.035 9 p4 -0.058 6 -0.084 7 -0.105 5 p5 -0.009 7 -0.028 3 -0.023 4 p6 -0.023 9 0 0 p7 -0.020 9 -0.000 2 0 p8 0 -0.000 1 0 p9 -0.005 3 -0.000 1 0 p10 -0.209 8 -0.330 7 -0.381 4 γ 0.006 8 0.004 2 0.001 9 η 0.007 3 0.010 9 0.009 1
Tools
Get Citation
Copy Citation Text
Jinfu SIMA, Leijie LAI, Pengzhi LI, Yu FANG, Limin ZHU. Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage[J]. Optics and Precision Engineering, 2023, 31(20): 2964
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: May. 11, 2023
Accepted: --
Published Online: Nov. 28, 2023
The Author Email: LAI Leijie (fangyu_hit@126.com), FANG Yu (fangyu_hit@126.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20