Acta Photonica Sinica, Volume. 47, Issue 3, 324001(2018)
Surface Planarization Process of RB-SiC Based on Magnetron Sputtering and ICP Etching
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ZHAO Yang-yong, LIU Wei-guo, XI Ying-xue. Surface Planarization Process of RB-SiC Based on Magnetron Sputtering and ICP Etching[J]. Acta Photonica Sinica, 2018, 47(3): 324001
Paper Information
Received: Oct. 30, 2017
Accepted: --
Published Online: Feb. 1, 2018
The Author Email: Yang-yong ZHAO (zhaoyy_0011@163.com)
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