[1] [1] WEN SH ZH. Research on micro machine and nano mechanics ［J］. Modern Scientific Instruments, 1998, 1(2):24-27. (in Chinese)

[2] [2] SHI R,QIU A P,SU Y. Implementation and experiments of micromechanical differential silicon resonant accelerometer ［J］. Opt. Precision Eng.,2010,18(12):2583-2589. (in Chinese)

[3] [3] CHEN G Y, WU J L, ZHAO L, et al.. Low-g micro inertial switch based on Archimedes’spiral ［J］. Opt. Precision Eng., 2009, 17(6):1257-1261. (in Chinese)

[4] [4] SAN H SH, SONG Z J, WANG X, et al.. Piezoresistive pressure sensors for harsh environments ［J］. Opt. Precision Eng., 2012, 20(3): 550-555. (in Chinese)

[5] [5] ROBINSON C H. Compiler: US, 6314887B1［P］. 2001-11-13.

[6] [6] ROBINSON C H. Compiler: US, 006765160［P］. 2001-07-20.

[7] [7] LI H, SHI G CH. Study on the elastic coefficient of MEMS planar micro-spring ［J］. Journal of Detection & Control, 2005,27(4):42-44. (in Chinese)

[8] [8] WU ZH L, CHANG J, FENG P ZH, et al.. Elastic coefficient analysis of MEMS planar microspring used in fuse ［J］. Journal of Nanjing University of Science and Technology(Natural Science),2008,32(2):140-143.(in Chinese)

[9] [9] DENNIS S. Greywall, Compiler: US, 0033598A1［P］. 2006-02-16.

[10] [10] CAI H G, YANG ZH Q, DING G F, et al.. Development of a MEMS electrical inertia micro-switch based on non-silicon substrate ［J］. Chinese Journal of Mechanical Engineering, 2009,45(3):156-161. (in Chinese)