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Optics and Precision Engineering, Volume. 21, Issue 2, 388(2013)

Calculation for spring constants of folded serpentine micro-cantilevers

LIU Shuang-jie1,2、* and HAO Yong-ping2
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  • 1[in Chinese]
  • 2[in Chinese]
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    LIU Shuang-jie, HAO Yong-ping. Calculation for spring constants of folded serpentine micro-cantilevers[J]. Optics and Precision Engineering, 2013, 21(2): 388

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    Received: Oct. 29, 2012

    Accepted: --

    Published Online: Feb. 26, 2013

    The Author Email: Shuang-jie LIU (shuangjieliu@126.com)

    DOI:10.3788/ope.20122010.0388

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology