Optics and Precision Engineering, Volume. 26, Issue 1, 1(2018)
Calibration method of silicon 〈111〉 orientation and its application in fabrication of silicon grating by anisotropic wet etching
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LIANG Ju-xi, ZHENG Yan-chang, QIU Ke-qiang, LIU Zheng-kun, XU Xiang-dong, HONG Yi-lin. Calibration method of silicon 〈111〉 orientation and its application in fabrication of silicon grating by anisotropic wet etching[J]. Optics and Precision Engineering, 2018, 26(1): 1
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Received: Aug. 23, 2017
Accepted: --
Published Online: Mar. 14, 2018
The Author Email: Ju-xi LIANG (timljx00@163.com)
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