Infrared and Laser Engineering, Volume. 44, Issue 3, 959(2015)

Crystallization of amorphous Si films by excimer laser annealing

Qin Juanjuan*, Shao Jingzhen, Liu Fengjuan, and Fang Xiaodong
Author Affiliations
  • [in Chinese]
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    References(10)

    [1] [1] Brotherton S D. Poly-Si TFT Technology and Architecture[M]. Berlin: Springer International Publishing, 2013: 185-251.

    [2] [2] Huang Jun, Hong Rongdun, Chen Xiaping, et al. Crystallization of amorphous hydrogenated SiC films by KrF excimer laser annealing[J]. Acta Optica Sinica, 2009, 28(s2): 378. (in Chinese)

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    [7] [7] Wang Qiang, Zhang Zhuqing, Hua Guoran, et al. Crystallizing the amorphous silicon thin films by using YAG laser[J]. Electronic Components and Materials, 2013, 1: 015. (in Chinese)

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    [10] [10] Staebler D L, Wronski C R. Reversible conductivity changes in discharge-produced amorphous Si[J]. Applied Physics Letters, 1977, 31: 292.

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    Qin Juanjuan, Shao Jingzhen, Liu Fengjuan, Fang Xiaodong. Crystallization of amorphous Si films by excimer laser annealing[J]. Infrared and Laser Engineering, 2015, 44(3): 959

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    Paper Information

    Category: 光电器件与材料

    Received: Jul. 8, 2014

    Accepted: Aug. 12, 2014

    Published Online: Jan. 26, 2016

    The Author Email: Juanjuan Qin (tiancaijuanjuan@126.com)

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