Infrared and Laser Engineering, Volume. 44, Issue 3, 959(2015)
Crystallization of amorphous Si films by excimer laser annealing
Get Citation
Copy Citation Text
Qin Juanjuan, Shao Jingzhen, Liu Fengjuan, Fang Xiaodong. Crystallization of amorphous Si films by excimer laser annealing[J]. Infrared and Laser Engineering, 2015, 44(3): 959