Research Progress in Chemical Mechanical Polishing of Diamond

AN Kang; XU Guangyu; WU Haiping; ZHANG Yachen; ZHANG Yongkang; LI Lijun; LI Hong; ZHANG Xufang; LIU Fengbin; LI Chengming

Journal of Synthetic Crystals, Volume. 53, Issue 10, 1675(2024)

AN Kang1... XU Guangyu1, WU Haiping1, ZHANG Yachen1, ZHANG Yongkang1, LI Lijun1, LI Hong1, ZHANG Xufang2, LIU Fengbin1,* and LI Chengming3 |Show fewer author(s)

Author Affiliations

¹School of Mechanical and Materials Engineering, North China University of Technology, Beijing 100144, China

²School of Information Science and Technology, North China University of Technology, Beijing 100144, China

³Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

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AN Kang, XU Guangyu, WU Haiping, ZHANG Yachen, ZHANG Yongkang, LI Lijun, LI Hong, ZHANG Xufang, LIU Fengbin, LI Chengming. Research Progress in Chemical Mechanical Polishing of Diamond[J]. Journal of Synthetic Crystals, 2024, 53(10): 1675

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